JPH0537472Y2 - - Google Patents
Info
- Publication number
- JPH0537472Y2 JPH0537472Y2 JP16327188U JP16327188U JPH0537472Y2 JP H0537472 Y2 JPH0537472 Y2 JP H0537472Y2 JP 16327188 U JP16327188 U JP 16327188U JP 16327188 U JP16327188 U JP 16327188U JP H0537472 Y2 JPH0537472 Y2 JP H0537472Y2
- Authority
- JP
- Japan
- Prior art keywords
- attached
- etching
- container
- chamber
- stirrer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005530 etching Methods 0.000 claims description 55
- 239000000498 cooling water Substances 0.000 claims description 15
- 238000005192 partition Methods 0.000 claims description 13
- 238000010992 reflux Methods 0.000 claims description 10
- 238000001816 cooling Methods 0.000 claims description 9
- 230000002093 peripheral effect Effects 0.000 claims description 3
- 239000007788 liquid Substances 0.000 description 16
- 230000007797 corrosion Effects 0.000 description 4
- 238000005260 corrosion Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000003756 stirring Methods 0.000 description 4
- 230000005284 excitation Effects 0.000 description 2
- 239000004615 ingredient Substances 0.000 description 2
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 1
- 239000005977 Ethylene Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
Landscapes
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16327188U JPH0537472Y2 (en]) | 1988-12-16 | 1988-12-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16327188U JPH0537472Y2 (en]) | 1988-12-16 | 1988-12-16 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0284325U JPH0284325U (en]) | 1990-06-29 |
| JPH0537472Y2 true JPH0537472Y2 (en]) | 1993-09-22 |
Family
ID=31447852
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16327188U Expired - Lifetime JPH0537472Y2 (en]) | 1988-12-16 | 1988-12-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0537472Y2 (en]) |
-
1988
- 1988-12-16 JP JP16327188U patent/JPH0537472Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0284325U (en]) | 1990-06-29 |
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